Publications

2 results for C.-H. Shin

Low resistivity tungsten for 32 nm node MOL contacts and beyond
- - Filippos Papadatos
  - Keith Wong
  - et al.
- 2012
- Microelectronic Engineering
Paper
Comparative study of CVD TiN vs. ALD TiN for contact metallization in 32nm node and beyond
- - Valli Arunachalam
  - Filippos Papadatos
  - et al.
- 2010
- ADMETA 2010
Conference paper