Publications

4 results for B. Sapp

Competitive and cost effective copper/low-k interconnect (BEOL) for 28 nm CMOS technologies
- - R. Augur
  - C. Child
  - et al.
- 2012
- Microelectronic Engineering
Paper
Competitive and cost effective copper/low-k interconnect (BEOL) for 28nm CMOS technologies
- - Rod Augur
  - Craig Child
  - et al.
- 2010
- ADMETA 2010
Conference paper
Predicting and reducing substrate induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Predicting substrate-induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Paper