A MICRO-ACTUATOR FOR A HARD-DISK DRIVE FINE TRACKING SERVO
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- IMECE 1998
Conference paper
Publications
18 results for Toshiki Hirano
MEMS milliactuator for hard-disk-drive tracking servo
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- JMEMS
PaperHigh aspect ratio etching in polymer for microactuator applications
- W.Y. Lee
- J. Gao
- et al.
- 1997
- SPIE Micromachining and Microfabrication 1997
Conference paperInvar electrodeposition for MEMS application
- T. Hirano
- L.-S. Fan
- 1996
- SPIE Micromachining and Microfabrication 1996
Conference paperDry-released nickel micromotors with low-friction bearing structure
- T. Hirano
- T. Furuhata
- et al.
- 1995
- IEICE Transactions on Electronics
PaperElectroplated and dry-released metallic microstructures for a lateral tunneling unit application
- Toshiki Hirano
- Dai Kobayashi
- et al.
- 1994
- Japanese Journal of Applied Physics
PaperDesign, fabrication, and operation of submicron gap comb-drive microactuators
- Toshiki Hirano
- Tomotake Furuhata
- et al.
- 1992
- JMEMS
PaperSub-micron gaps without sub-micron etching
- T. Furuhata
- T. Hirano
- et al.
- 1991
- MEMS 1991
Conference paper