Micromachining applications of a high resolution ultrathick photoresist
- K.Y. Lee
- N. LaBianca
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
12 results for Nancy LaBianca
High-aspect-ratio resist for thick-film applications
- N. LaBianca
- J. Gelorme
- 1995
- Microlithography 1995
Conference paper