Publications

2 results for T. Q. Hurd

A Novel Dry Selective Etch of SiGe for the Enablement of High Performance Logic Stacked Gate-All-Around NanoSheet Devices
- - Nicolas Loubet
  - T. Devarajan
  - et al.
- 2019
- IEDM 2019
Conference paper
Reducing time dependent line to line leakage following post CMP clean
- - Donald F. Canaperi
  - Satyavolu S. Papa Rao
  - et al.
- 2010
- MRS Online Proceedings Library
Conference paper