Crystallographic texture and phase metrology during damascene copper processing
- K.J. Kozaczek
- P. DeHaven
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
17 results for S. Malhotra
Picosecond ultrasonics study of the vibrational modes of a nanostructure
- G. Andrew Antonelli
- Humphrey J. Maris
- et al.
- 2002
- Journal of Applied Physics
PaperAn optimal liner for copper damascene interconnects
- D. Edelstein
- C. Uzoh
- et al.
- 2001
- ADMETA 2001
Conference paperMechanisms for very long electromigration lifetime in dual-damascene Cu interconnections
- C.-K. Hu
- L. Gignac
- et al.
- 2001
- Applied Physics Letters
PaperA high performance 0.13 μm copper BEOL technology with low-k dielectric
- R.D. Goldblatt
- B.N. Agarwala
- et al.
- 2000
- IITC 2000
Conference paperMicrostructural analysis of copper interconnections using picosecond ultrasonics
- James M.E. Harper
- Sandra G. Malhotra
- et al.
- 2000
- Materials Research Society Symposium-Proceedings
PaperDepth-sensitive strain analysis of a W/Ta/W trilayer
- S. Malhotra
- Z. Rek
- et al.
- 1996
- MRS Fall Meeting 1996
Conference paper