Publications

12 results for Andreas Knorr

Copper contact metallization using Ru-based barrier liners for 45 nm and 32 nm nodes: Reliability and device performance
- - Soon-Cheon Seo
  - Chih-Chao Yang
  - et al.
- 2008
- ADMETA 2008
Conference paper
Copper contact metallization for 22 nm and beyond
- - Soon-Cheon Seo
  - Chih-Chao Yang
  - et al.
- 2009
- IITC 2009
Conference paper