High-quality crystalline layer transfer from a silicon-on-insulator substrate onto a sapphire substrate using wafer bonding
- D. Singh
- L.T. Shi
- et al.
- 2003
- Journal of Electronic Materials
Paper
Publications
155 results for Alfred Grill
A comprehensive simulation study of strained-Si/SiGe nMODFET scaling for RF applications
- Qiqing Christine Ouyang
- S.J. Koester
- et al.
- 2002
- SISPAD 2002
Conference paperCharacteristics of low-k and ultralow-k PECVD deposited SiCOH films
- A. Grill
- V.V. Patel
- et al.
- 2002
- MRS Proceedings 2002
Conference paperEffects of precursor additives on the stability of plasma enhanced chemical vapor deposited a-GeC(O):H films
- A. Grill
- S. Guilley
- et al.
- 2002
- Journal of Materials Research
PaperThe role of hydrogen on the friction mechanism of diamond-like carbon films
- C. Donnet
- J. Fontaine
- et al.
- 2001
- Tribology Letters
PaperSiCOH dielectrics: From low-κ to Ultralow-κ by PECVD
- A. Grill
- D. Edelstein
- et al.
- 2001
- ADMETA 2001
Conference paperStrain relaxation mechanisms in He+-implanted and annealed Si1-xGex layers on Si(001) substrates
- S. Christiansen
- P.M. Mooney
- et al.
- 2001
- MRS Proceedings 2001
Conference paperFrom tribological coatings to low-k dielectrics for ULSI interconnects
- A. Grill
- 2001
- Thin Solid Films
Conference paperTribochemistry between hydrogen and diamond-like carbon films
- J. Fontaine
- C. Donnet
- et al.
- 2001
- Surface and Coatings Technology
PaperTunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper