Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition
- A. Grill
- V.V. Patel
- 2001
- Applied Physics Letters
Paper
Publications
155 results for Alfred Grill
Strained Si NMOSFETs for high performance CMOS technology
- K. Rim
- S.J. Koester
- et al.
- 2001
- VLSI Technology 2001
Conference paperAmorphous carbon based materials as the interconnect dielectric in ULSI chips
- A. Grill
- 2001
- Diamond and Related Materials
PaperTribological and mechanical properties of diamond-like carbon prepared by high-density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2001
- Diamond and Related Materials
PaperBottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition
- Deborah A. Neumayer
- Katherine L. Saenger
- et al.
- 1999
- MRS Proceedings 1999
Conference paperNovel low-k dual-phase materials prepared by PECVD
- A. Grill
- V.V. Patel
- 2000
- MRS Proceedings 2000
Conference paperDiamond-like carbon prepared by high density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2000
- Diamond and Related Materials
PaperOxygen stoichiometry in PdOx and PdOxPt electrode layers during processing of ferroelectric and high-epsilon perovskites
- K.L. Saenger
- C. Cabral Jr.
- et al.
- 2000
- Journal of Materials Research
PaperElectrical and optical properties of diamond-like carbon
- A. Grill
- 1999
- Thin Solid Films
PaperLow dielectric constant SiCOH films as potential candidates for interconnect dielectrics
- A. Grill
- L. Perraud
- et al.
- 1999
- MRS Spring Meeting 1999
Paper