High-dielectric constant insulators and the AMLCD process: is amorphous BST a candidate?
- P. Andry
- D.A. Neumayer
- et al.
- 1999
- MRS Spring Meeting 1999
Conference paper
Publications
155 results for Alfred Grill
Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane
- A. Grill
- V.V. Patel
- 1999
- Journal of Applied Physics
PaperSolid state 13C and 1H nuclear magnetic resonance investigations of hydrogenated amorphous carbon
- C. Donnet
- J. Fontaine
- et al.
- 1999
- Journal of Applied Physics
PaperAl-Ta bilayer as an oxidation resistant barrier for electrode structures in high dielectric constant capacitors
- A. Grill
- C. Cabral Jr.
- 1999
- Journal of Materials Research
PaperLayered TaSiN as an oxidation resistant electrically conductive barrier
- A. Grill
- C.V. Jahnes
- et al.
- 1999
- Journal of Materials Research
PaperFabrication of multilayer ferroelectric films
- Deborah A. Neumayer
- Peter R. Duncombe
- et al.
- 1999
- Integrated Ferroelectrics
PaperPlasma-deposited diamondlike carbon and related materials
- A. Grill
- 1999
- IBM J. Res. Dev
PaperDiamond-like carbon: State of the art
- Alfred Grill
- 1999
- Diamond and Related Materials
ReviewElectrode structures for integration of ferroelectric or high dielectric constant films in semiconductor devices
- Alfred Grill
- 1998
- MRS Fall Meeting 1998
PaperStability and oxidation behavior of Ir thin film electrodes on Si and SiO2
- K.L. Saenger
- A. Grill
- et al.
- 1998
- MRS Fall Meeting 1998
Conference paper