Epitaxial graphene nanoribbon array fabrication using BCP-assisted nanolithography
- Guanxiong Liu
- Yanqing Wu
- et al.
- 2012
- ACS Nano
Paper
Publications
155 results for Alfred Grill
Fabrication of an electrical spin transport device utilizing a diazonium salt/hafnium oxide interface layer on epitaxial graphene grown on 6 H-SiC(0001)
- Joseph Abel
- Akitomo Matsubayashi
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
PaperIn-situ metal/dielectric capping process for electromigration enhancement in Cu interconnects
- Chih-Chao Yang
- Fen Chen
- et al.
- 2012
- IITC 2012
Conference paperIn situ Co/SiC(N,H) capping layers for Cu/Low-k interconnects
- Chih-Chao Yang
- B. Li
- et al.
- 2012
- IEEE Electron Device Letters
PaperCompetitive and cost effective copper/low-k interconnect (BEOL) for 28 nm CMOS technologies
- R. Augur
- C. Child
- et al.
- 2012
- Microelectronic Engineering
PaperDesigning porous ultra low-κ dielectrics to meet scaling challenges
- E. Todd Ryan
- Steve Gates
- et al.
- 2011
- ADMETA 2011
Conference paperRobust ultrathin (20-25 nm) trilayer dielectric low k Cu damascene cap for sub-30 nm nanoelectronic devices
- Son Nguyen
- T. Haigh
- et al.
- 2011
- ECS Meeting 2011
Conference paperMetal-catalyzed graphitization in Ni-C alloys and amorphous-C/Ni bilayers
- Katherine L. Saenger
- Christian Lavoie
- et al.
- 2010
- MRS Fall Meeting 2010
Conference paperElectrical characterization of wafer-scale epitaxial graphene and its RF applications
- Yu-Ming Lin
- Keith A. Jenkins
- et al.
- 2011
- IMS 2011
Conference paperOptimization of porous ultra low- dielectrics (κ≤ 2.55) for 28nm generation
- D. Kioussis
- E.T. Ryan
- et al.
- 2011
- IITC/MAM 2011
Conference paper