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- 2010
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Publications
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- Applied Physics Letters
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- Steven Molis
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- 2010
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- V.K. Kamineni
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- 2009
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- C.M. Settens
- et al.
- 2009
- FCMN 2009
Conference paperIntegration compatible porous SiCOH dielectrics from 45 to 22 nm
- S. Gates
- A. Grill
- et al.
- 2008
- ADMETA 2008
Conference paperAdjusting the skeleton and pore structure of porous SiCOH dielectrics
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- G. Dubois
- et al.
- 2009
- JES
Paper