Amorphous carbon active contact layer for reliable nanoelectromechanical switches
- Daniel Grogg
- Christopher L. Ayala
- et al.
- 2014
- MEMS 2014
Conference paper
Publications
50 results for Urs Duerig
Thermal probe maskless lithography for 27.5 nm half-pitch Si technology
- Lin Lee Cheong
- Philip Paul
- et al.
- 2013
- Nano Letters
PaperCurved in-plane electromechanical relay for low power logic applications
- Daniel Grogg
- Ute Drechsler
- et al.
- 2013
- JMM
PaperNanoscale thermomechanics of wear-resilient polymeric bilayer systems
- Tassilo Kaule
- Yi Zhang
- et al.
- 2012
- ACS Nano
PaperFundamental scaling properties of electro-mechanical switches
- A.W. Knoll
- D. Grogg
- et al.
- 2012
- New Journal of Physics
PaperNEM switch technologies for low-power logic applications
- Daniel Grogg
- Yu Pu
- et al.
- 2012
- SENSORS 2012
Conference paperField stitching in thermal probe lithography by means of surface roughness correlation
- Ph. Paul
- A.W. Knoll
- et al.
- 2012
- Nanotechnology
PaperDirected placement of gold nanorods using a removable template for guided assembly
- Felix Holzner
- Cyrill Kuemin
- et al.
- 2011
- Nano Letters
PaperHigh density multi-level recording for archival data preservation
- Felix Holzner
- Ph. Paul
- et al.
- 2011
- Applied Physics Letters
PaperRapid turnaround scanning probe nanolithography
- Philip C. Paul
- Armin W. Knoll
- et al.
- 2011
- Nanotechnology
Paper