Publications

4 results for A. Lauwers

Kinetics of Ni₃Si₂ formation in the Ni ₂Si-NiSi thin film reaction from in situ measurements
- - J.A. Kittl
  - M.A. Pawlak
  - et al.
- 2007
- Applied Physics Letters
Paper
Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates
- - C. Torregiani
  - C. Van Bockstael
  - et al.
- 2007
- Microelectronic Engineering
Paper
Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully silicided gate applications
- - J.A. Kittl
  - M.A. Pawlak
  - et al.
- 2007
- Applied Physics Letters
Paper
Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions
- - K. Opsomer
  - D. Deduytsche
  - et al.
- 2007
- Applied Physics Letters
Paper