Publications

12 results for J. Benedict

High pressure oxidation induced stress in submicron trench structures
- - R. Stengl
  - H.-J. Timme
  - et al.
- 1996
- Applied Physics Letters
Paper
Shallow n⁺ Junctions in Silicon by Arsenic Gas-Phase Doping
- - J.F. DeGeolormo
  - D.K. Sodana
  - et al.
- 1994
- JES
Paper