Publications

3 results for Z. Lin

Thin-film transformations and volatile products in the formation of nanoporous low- k polymethylsilsesquioxane-based dielectric
- - P. Lazzeri
  - L. Vanzetti
  - et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Templating organosilicate vitrification using unimolecular self-organizing polymers: Evolution of morphology and nanoporosity development with network formation
- - Teddie Magbitang
  - Victor Y. Lee
  - et al.
- 2005
- Advanced Materials
Paper
ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
- - P. Lazzeri
  - G.W. Rubloff
  - et al.
- 2004
- Surface and Interface Analysis
Paper