Publications

2 results for T. Sato

Selective epitaxial channel ground plane thin SOI CMOS devices
- - Zhibin Ren
  - M. Ieong
  - et al.
- 2005
- IEDM 2005
Conference paper
Integration and optimization of embedded-SiGe, compressive and tensile stressed liner films, and stress memorization in advanced SOI CMOS technologies
- - M. Horstmann
  - A. Wei
  - et al.
- 2005
- IEDM 2005
Conference paper