Publications

2 results for Dustin W. Janes

LCDU improvement of EUV-patterned vias with DSA
- - Jing Guo
  - Dustin W. Janes
  - et al.
- 2019
- MEMS/NEMS/MOEMS 2019
Conference paper
Interfacial layers with photoswitching surface energy for block copolymer alignment and directed self-assembly
- - Michael J. Maher
  - Christopher M. Bates
  - et al.
- 2015
- J. Photopolym. Sci. Tech.
Paper