Microstructural comparisons of ultrathin Cu films deposited by ion-beam and dc-magnetron sputtering
- W.L. Prater
- E.L. Allen
- et al.
- 2005
- Journal of Applied Physics
Paper
Publications
3 results for W.L. Prater
Reduction of resistivity in Cu thin films by partial oxidation: Microstructural mechanisms
- Walter L. Prater
- Emily L. Allen
- et al.
- 2004
- Applied Physics Letters
PaperSERVO PERFORMANCE OF ACTUATOR BEARING GREASES
- Walter L. Prater
- Garvin J. Stone
- et al.
- 1996
- IMECE 1996
Conference paper