Fabrication of ultrafloppy single-crystal silicon cantilever for magnetic resonance imaging
- J.-S. Park
- D.-W. Lee
- et al.
- 2005
- SENSORS 2005
Conference paper
Publications
3 results for Urs Gysin
Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants
- Dong-Weon Lee
- Jung-Ho Kang
- et al.
- 2005
- JMM
PaperTemperature dependence of the force sensitivity of silicon cantilevers
- U. Gysin
- S. Rast
- et al.
- 2004
- Physical Review B - CMMP
Paper