Publications

2 results for M. Caymax

Current challenges in Ge MOS technology
- - A. Dimoulas
  - M. Houssa
  - et al.
- 2006
- ECS Meeting 2006
Conference paper
Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
- - Sherif Sedky
  - Paolo Fiorini
  - et al.
- 1998
- JMEMS
Paper