Publications

2 results for C. Chang

Fluoropolymer resists: Fundamentals and lithographic evaluation
- - Hiroshi Ito
  - H.D. Truong
  - et al.
- 2004
- J. Photopolym. Sci. Tech.
Paper
Hydrogen bonding and aqueous base dissolution behavior of hexafluoroisopropanol-bearing polymers
- - Hiroshi Ito
  - William D. Hinsberg
  - et al.
- 2003
- Microlithography 2003
Conference paper