Effect of low numerical-aperture femtosecond two-photon absorption on (SU-8) resist for ultrahigh-aspect-ratio microstereolithography
- W.H. Teh
- U. Dürig
- et al.
- 2005
- Journal of Applied Physics
Paper
Publications
116 results for Ute Drechsler
Wafer-scale microdevice transfer/interconnect: Its application in an AFM-based data-storage system
- Michel Despont
- Ute Drechsler
- et al.
- 2004
- JMEMS
PaperReal-time mass sensing by nanomechanical resonators in fluid
- Murali K. Ghatkesar
- V. Barwich
- et al.
- 2004
- SENSORS 2004
Conference paperA highly parrallel probe-based storage system
- M. Despont
- T. Altebaeumer
- et al.
- 2004
- MNC 2004
Conference paperUltra-small single-crystal silicon cantilevers for scanning force microscopes
- J.L. Yang
- M. Despont
- et al.
- 2004
- MEMS 2004
Conference paperSU-8 for real three-dimensional subdiffraction-limit two-photon microfabrication
- W.H. Teh
- U. Dürig
- et al.
- 2004
- Applied Physics Letters
PaperTemperature dependent nano indentation of thin polymer films with the scanning force microscope
- M. Hinz
- A. Kleiner
- et al.
- 2004
- European Polymer Journal
PaperDemonstration of thermomechanical recording at 641 Gbit/in2
- H. Pozidis
- W. Häberle
- et al.
- 2004
- IEEE Transactions on Magnetics
PaperThousands of Microcantilevers for Highly Parallel and Ultra-dense Data Storage
- P. Vettiger
- T.R. Albrecht
- et al.
- 2003
- IEDM 2003
Conference paperCharging effects on the carrier mobility in silicon-on-insulator wafers covered with a high-k layer
- D. Halley
- G.J. Norga
- et al.
- 2003
- Journal of Applied Physics
Paper