Robustness of ultrathin aluminum oxide dielectrics on Si(001)
- M. Copel
- E. Cartier
- et al.
- 2001
- Applied Physics Letters
Paper
Publications
4 results for M. Poppeller
Hot electron emission lithography
- M. Poppeller
- E. Cartier
- et al.
- 1999
- Microlithography 1999
Conference paperHot Electron Emission Lithography: A method for efficient large area e-beam projection
- M. Poppeller
- E. Cartier
- et al.
- 1999
- Microelectronic Engineering
PaperHot electron emission lithography
- M. Poppeller
- E. Cartier
- et al.
- 1998
- Applied Physics Letters
Paper