Molecular-controlled fracture and release of templated nanoporous organosilicate thin films
- Markus D. Ong
- Willi Volksen
- et al.
- 2008
- Advanced Materials
Paper
Publications
30 results for Reinhold H. Dauskardt
Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
- Geraud Dubois
- Willi Volksen
- et al.
- 2008
- Journal of Sol-Gel Science and Technology
PaperSuperior mechanical properties of dense and porous organic/inorganic hybrid thin films
- Willi Volksen
- Geraud Dubois
- et al.
- 2007
- VMIC 2007
Conference paperMolecular network reinforcement of sol-gel glasses
- Geraud Dubois
- Willi Volksen
- et al.
- 2007
- Advanced Materials
PaperAdhesion between template materials and UV-cured nanoimprint resists
- F.A. Houle
- Eric Guyer
- et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperAdhesion between template materials and UV-cured nanoimprint resists
- Frances A. Houle
- Eric Guyer
- et al.
- 2006
- SPIE Advanced Lithography 2006
Conference paperToughening of nanoporous glasses using porogen residuals
- Daniel A. Maidenberg
- Willi Volksen
- et al.
- 2004
- Nature Materials
PaperEffects of templating byproducts on adhesion of nanoporous dielectric films
- D. Maidenberg
- W. Volksen
- et al.
- 2003
- IITC 2003
Conference paperInvited paper environmental effects on interfacial adhesion
- M.W. Lane
- J.M. Snodgrass
- et al.
- 2001
- Microelectronics Reliability
PaperPlasticity contributions to interface adhesion in thin-film interconnect structures
- Michael Lane
- Reinhold H. Dauskardt
- et al.
- 2000
- Journal of Materials Research
Paper