Publications

2 results for C. Beuret

Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- - Laurent Dellmann
  - Sylvian Roth
  - et al.
- 1998
- Sensors and Actuators, A: Physical
Paper
Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
- - L. Dellmann
  - S. Roth
  - et al.
- 1998
- Microsystem Technologies
Paper