Structure in thin and ultrathin spin-cast polymer films
- Curtis W. Frank
- V. Rao
- et al.
- 1996
- Science
Paper
Publications
3 results for V. Rao
Role of residual casting solvent in dissolution behavior of poly (3-methyl-4-hydroxystyrene) films
- Veena Rao
- William D. Hinsberg
- et al.
- 1994
- Microlithography 1994
Conference paperThe influence of residual casting solvent on the dissolution behavior of diazonaphthoquinone resists
- V. Rao
- W.D. Hinsberg
- et al.
- 1993
- Microlithography 1993
Conference paper