Energy density and temperature calibration for feol nanosecond laser annealing
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- et al.
- 2020
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Conference paper
Publications
4 results for Shaoyin Chen
External Resistance Reduction by Nanosecond Laser Anneal in Si/SiGe CMOS Technology
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- Heng Wu
- et al.
- 2018
- IEDM 2018
Conference paperDual beam laser annealing for contact resistance reduction and its impact on VLSI integrated circuit variability
- Zuoguang Liu
- Oleg Gluschenkov
- et al.
- 2017
- VLSI Technology 2017
Conference paperMechanical enhancement of low- k organosilicates by laser spike annealing
- Willi Volksen
- Geraud Dubois
- et al.
- 2008
- JES
Paper