A high reliability Metal Insulator Metal capacitor for 0.18 μm Copper technology
- M. Armacost
- A. Augustin
- et al.
- 2000
- IEDM 2000
Conference paper
Publications
4 results for Gary R. Hueckel
Challenges for accurate reliability projections in the ultra-thin oxide regime
- E. Wu
- W.W. Abadeer
- et al.
- 1999
- IRPS 1999
Conference paperManufacturability demonstration of an integrated SiGe HBT technology for the analog and wireless marketplace
- D. Ahlgren
- M.M. Gilbert
- et al.
- 1996
- IEDM 1996
Conference paper200 mm SiGe-HBT technology for wireless and mixed-signal applications
- D.L. Harame
- K. Schonenberg
- et al.
- 1994
- IEDM 1994
Conference paper