Fully subtractive Ru Topvia interconnects with minimum 9 nm-space airgap for RC performance and reliability enhancement as post-Cu interconnects
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- et al.
- 2024
- IEDM 2024
Conference paper
Publications
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Backside power distribution for nanosheet technologies beyond 2nm
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- Wonhyuk Hong
- et al.
- 2024
- VLSI Technology and Circuits 2024
Conference paper