Publications

2 results for M. Schadt

Two-level metal fully planarized interconnect structure implemented on a 64 kb CMOS SRAM
- - D. Moy
  - M. Schadt
  - et al.
- 1989
- VMIC 1989
Conference paper
REACTIVE ION ETCHING OF Al(Cu) ALLOYS.
- - C.-K. Hu
  - M.B. Small
  - et al.
- 1986
- MRS Fall Meeting 1986
Conference paper