Publications

3 results for Linda Wangoh

In-line XPS metrology for area selective deposition processes on patterned structures
- - Manasa Medikonda
  - Linda Wangoh
  - et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
The Extreme Extendibility of Cu and Post-Cu Dual Damascene BEOL Interconnect Technology
- - Daniel Edelstein
  - Son Nguyen
  - et al.
- 2024
- IEDM 2024
Invited talk
Optimization of Area Selective Barrier on Different Metal Interconnects
- - Linda Wangoh
  - Andrew Simon
  - et al.
- 2024
- ASMC 2024
Talk