Publications

2 results for Samuel Swaroop Munnangi

Fully subtractive Ru Topvia interconnects with minimum 9 nm-space airgap for RC performance and reliability enhancement as post-Cu interconnects
- - Koichi Motoyama
  - Jaemyung Choi
  - et al.
- 2024
- IEDM 2024
Conference paper
Evaluation of different metal preclean conditions for MOL for 2nm and beyond
- - Samuel Swaroop Munnangi
  - Andrew Simon
  - et al.
- 2024
- ASMC 2024
Conference paper