Publications

2 results for K. A. Niradha Sachinthani

New Photoacid Generators Designed for Advanced EUV Patterning
- - Kamal P. Pandey
  - Emad Aqad
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
Identifying trends in photoresist polymer properties to improve line and space defects Considerations to Improve Microbridge Defectivity in EUV Chemically Amplified Photoresists
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Conference paper