Evaluation of In-line SIMS Impact on Device Reliability and Performance
- Jander Cruz
- Li Xiang
- et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
Publications
3 results for Padraig Timoney
Scatterometry-informed machine learning study to determine bi-directional intercorrelation of adjacent patterning steps
- Padraig Timoney
- Stefan Schoeche
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Conference paperMetrology-Design Co-Optimization for BEOL dimensional characterization using scatterometry
- Stefan Schoeche
- Daniel Schmidt
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Conference paper