Publications

3 results for Edon Vitaku

The Impact of Polymer Compositional Homogeneity on Lithography and Defects
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
New Photoacid Generators Designed for Advanced EUV Patterning
- - Kamal P. Pandey
  - Emad Aqad
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
Commercialization of Non-PFAS KrF and Development of Non-PFAS EUV Photoresists
- - Cong Liu
  - Joseph Lachowski
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper