Publications

3 results for KwangMo Choi

Consideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- - KwangMo Choi
  - YunJi Kim
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
Effect of Composition Uniformity in the Polymer Chain of EUV Photoresist on Lithographic Performance
- - EuiJin Ko
  - YooRim Jang
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
The Impact of Polymer Compositional Homogeneity on Lithography and Defects
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper