Publications

2 results for Kai Zhao

Advanced Multi-Vt Enabled by Selective Layer Reductions for 2nm Nanosheet Technology and Beyond
- - Ruqiang Bao
  - Yusuke Oniki
  - et al.
- 2024
- IEDM 2024
Conference paper
Highly Selective SiGe Dry Etch Process for the Enablement of Stacked Nanosheet Gate-All-Around Transistors
- - Curtis Durfee
  - Subhadeep Kal
  - et al.
- 2021
- ECS Meeting 2021
Conference paper