Publications

3 results for Gen Tsutsui

EUV patterned gate variation reduction in next generation transistor architectures
- - Gopal Kenath
  - Martin Burkhardt
  - et al.
- 2024
- SPIE Advanced Lithography + Patterning 2024
Conference paper
Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era
- - Hemanth Jagannathan
  - Susan Fan
  - et al.
- 2023
- SSDM 2023
Invited talk
Hardware Based Performance Assessment of Vertical-Transport Nanosheet Technology
- - Gen Tsutsui
  - Seunghyun Song
  - et al.
- 2022
- IEDM 2022
Invited talk