Formation of a crystalline metal-rich suicide in thin film titanium/silicon reactions
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1996
- Thin Solid Films
Paper
Publications
204 results for Christian Lavoie
Dependence of crystallographic texture of C54 TiSi2 on thickness and linewidth in submicron CMOS structures
- V. Svilan
- K.P. Rodbell
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperLight scattering measurement of surface topography during formation of titanium silicide
- C. Lavoie
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Conference paperIn situ analysis of the formation of thin TiSi2 (<50 nm) contacts in submicron CMOS structures during rapid thermal annealing
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Conference paper