Publications

2 results for F. Mazzamuto

Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects
- - Takeshi Nogami
  - Oleg Gluschenkov
  - et al.
- 2022
- VLSI Technology and Circuits 2022
Conference paper
Impact of Nanosecond Laser Anneal on PVD Ru Films
- - D. Sil
  - Yasir Sulehria
  - et al.
- 2021
- IITC 2021
Conference paper