Integration of polymer self-assembly for lithographic application
- Joy Y. Cheng
- Daniel P. Sanders
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Publications
133 results for Ho-Cheol Kim
Effect of porogen molecular architecture and loading on structure of porous thin films
- Hae-Jeong Lee
- Christopher L. Soles
- et al.
- 2008
- Chemistry of Materials
PaperThin poly(styrene-block-4-hydroxystyrene) block copolymer films spin-coated directly on topographic prepattern substrates
- Geuntak Lee
- Pil Sung Jo
- et al.
- 2008
- Macromolecules
PaperSurface patterns from block copolymer self-assembly
- Ho-Cheol Kim
- William D. Hinsberg
- 2008
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperGuided self-assembly of block-copolymer nanostructures
- A. Karim
- B. Berry
- et al.
- 2008
- NSTI-Nanotech 2008
Conference paperPatterning sub-10 nm line patterns from a block copolymer hybrid
- Sang-Min Park
- Oun-Ho Park
- et al.
- 2008
- Nanotechnology
PaperPlasma etching of nanometer-scale self-assembled features
- Ying Zhang
- Charles T. Black
- et al.
- 2008
- ISTC 2008
Conference paperOrganic thin film transistor using a photo-curable organic/inorganic hybrid material as a gate dielectric
- Do-Hoon Hwang
- Yong Suk Yang
- et al.
- 2008
- Journal of Nanoscience and Nanotechnology
PaperDense self-assembly on sparse chemical patterns: Rectifying and multiplying lithographic patterns using block copolymers
- Joy K. Cheng
- Charles T. Rettner
- et al.
- 2008
- Advanced Materials
PaperNanopatterning of thin polymer films by controlled dewetting on a topographic pre-pattern
- Bokyung Yoon
- Himadri Acharya
- et al.
- 2008
- Soft Matter
Paper