Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
- A.A. Lubguban
- J.A. Lubguban
- et al.
- 2008
- Thin Solid Films
Paper
Publications
133 results for Ho-Cheol Kim
Fabrication of 20 nm half-pitch gratings by corrugation-directed self-assembly
- Ho-Cheol Kim
- Charles T. Rettner
- et al.
- 2008
- Nanotechnology
PaperControlled topology of block copolymer gate insulators by selective etching of cylindrical microdomains in pentacene organic thin film transistors
- Pil Sung Jo
- Jinwoo Sung
- et al.
- 2008
- Advanced Functional Materials
PaperMultilayer magnetic antidot arrays from block copolymer templates
- V.P. Chuang
- W. Jung
- et al.
- 2008
- Journal of Applied Physics
PaperHigh-aspect-ratio cylindrical nanopore arrays and their use for templating titania nanoposts
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2008
- Advanced Materials
PaperHierarchical ordering of block copolymer nanostructures by solvent annealing combined with controlled dewetting
- Tae Hee Kim
- Jiyoung Hwang
- et al.
- 2008
- Advanced Materials
PaperPhotopatternable nanoporous titania films by coassembly of diblock copolymer and chemically modified titanium alkoxide
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2007
- ACS National Meeting 2007
Conference paperPolymer self assembly in semiconductor microelectronics
- Charles T. Black
- Ricardo Ruiz
- et al.
- 2007
- IBM J. Res. Dev
ReviewSelf-aligned, self-assembled organosilicate line patterns of ∼20nm half-pitch from block copolymer mediated self-assembly
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperRapid directed self assembly of lamellar microdomains from a block copolymer containing hybrid
- Joy Y. Cheng
- Jed Pitera
- et al.
- 2007
- Applied Physics Letters
Paper