Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever
- B.W. Chui
- T.W. Kenny
- et al.
- 1998
- Applied Physics Letters
Paper
Publications
108 results for D. Rugar
Atomic forcemicroscope-based data storage: Track servo and wear study
- B.D. Terris
- S. Rishton
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
PaperHigh density data storage based on the atomic force microscope
- H.J. Mamin
- R.P. Ried
- et al.
- 1998
- INVMTC 1998
Conference paperLow-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
- Benjamin W. Chui
- Timothy D. Stowe
- et al.
- 1998
- JMEMS
PaperForce-detected electron-spin resonance: Adiabatic inversion, nutation, and spin echo
- K. Wago
- D. Botkin
- et al.
- 1998
- Physical Review B - CMMP
Paper6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips
- Robert P. Ried
- H. Jonathon Mamin
- et al.
- 1997
- JMEMS
PaperA novel dual-axial AFM cantilever with independent piezoresistive sensors for simultaneous detection of lateral and vertical forces
- Benjamin W. Chui
- Thomas W. Kenny
- et al.
- 1997
- IMECE 1997
PaperA NOVEL DUAL-AXIAL AFM CANTILEVER WITH INDEPENDENT PIEZORESISTIVE SENSORS FOR SIMULTANEOUS DETECTION OF LATERAL AND VERTICAL FORCES
- Benjamin W. Chui
- Thomas W. Kenny
- et al.
- 1997
- IMECE 1997
Conference paperAttonewton force detection using ultrathin silicon cantilevers
- T.D. Stowe
- K.Y. Yasumura
- et al.
- 1997
- Applied Physics Letters
Paper5 MHz, 2 N/m piezoresistive cantilevers with INCISIVE tips
- R.P. Ried
- H.J. Mamin
- et al.
- 1997
- TRANSDUCERS 1997
Conference paper