Publications

2 results for Huixiong Dai

Development of amorphous silicon based EUV hardmasks through physical vapor deposition
- - Anuja De Silva
  - Yann Mignot
  - et al.
- 2017
- SPIE Photomask Technology + EUV Lithography 2017
Conference paper
Directed self-assembly defectivity assessment. Part II
- - Chris Bencher
  - He Yi
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper