Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low- k dielectrics
- Weiyi Li
- Dongfei Pei
- et al.
- 2017
- JVSTA
Paper
Publications
4 results for Sean W. King
Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films
- Weiyi Li
- Dongfei Pei
- et al.
- 2016
- Applied Physics Letters
PaperDielectric damage
- H. Ren
- S. Banna
- et al.
- 2014
- ECS Transactions
PaperNew classes of ULK dielectrics with superior thermomechanical properties
- Yusuke Matsuda
- Sean W. King
- et al.
- 2011
- ADMETA 2011
Conference paper