High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction
- David Cooper
- N. Bernier
- et al.
- 2017
- Applied Physics Letters
Paper
Publications
4 results for David Cooper
Nanoscale strain distributions in embedded SiGe semiconductor devices revealed by precession electron diffraction and dual lens dark field electron holography
- Yun-Yu Wang
- David Cooper
- et al.
- 2015
- Applied Physics Letters
PaperOff axis holography of doped and intrinsic silicon nanowires: Interpretation and influence of fields in the vacuum
- M.I. Den Hertog
- L. Rouviere
- et al.
- 2010
- JPCS
Conference paperMapping active dopants in single silicon nanowires using off-axis electron holography
- Martien I. Den Hertog
- Heinz Schmid
- et al.
- 2009
- Nano Letters
Paper