A selective etching process for chemically inert high-k metal oxides
- Katherine L. Saenger
- Harald F. Okorn-Schmidt
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
97 results for Katherine Saenger
Electrodes and barriers for dram and feram: Processing, integration, and fundamentals
- K.L. Saenger
- P.C. Andricacos
- et al.
- 2001
- MRS Online Proceedings Library
Conference paperSub-micron platinum electrodes by through-mask plating
- K.L. Saenger
- G. Costrini
- et al.
- 2000
- ECS Meeting 2000
Conference paperSubmicrometer Platinum Electrodes by Through-Mask Plating
- K.L. Saenger
- G. Costrini
- et al.
- 2001
- JES
PaperDetermination of Ir consumption during thermal oxidation and PbZrxTi1-xO3 processing using Bragg-peak fringe analysis
- K.L. Saenger
- D. Neumayer
- 2001
- Journal of Applied Physics
PaperDetermination of processing damage in thin polycrystalline Ir films using Bragg-peak fringe analysis
- K.L. Saenger
- I.C. Noyan
- 2001
- Journal of Applied Physics
PaperOpportunities and challenges in ultra low k dielectrics for interconnect applications
- S. Purushothaman
- S.V. Nitta
- et al.
- 2001
- Technical Digest-International Electron Devices Meeting
PaperProperties and decomposition behaviors of reactively sputtered Pt(O) electrode materials
- K.L. Saenger
- S.M. Rossnagel
- 1999
- MRS Proceedings 1999
Conference paperBottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition
- Deborah A. Neumayer
- Katherine L. Saenger
- et al.
- 1999
- MRS Proceedings 1999
Conference paperOxygen stoichiometry in PdOx and PdOxPt electrode layers during processing of ferroelectric and high-epsilon perovskites
- K.L. Saenger
- C. Cabral Jr.
- et al.
- 2000
- Journal of Materials Research
Paper