Optimization of Ta-Si-N thin films for use as oxidation-resistant diffusion barriers
- C. Cabral
- K.L. Saenger
- et al.
- 2000
- Journal of Materials Research
Paper
Publications
97 results for Katherine Saenger
Thermal stability and oxygen-loss characteristics of Pt(O) films prepared by reactive sputtering
- K.L. Saenger
- C. Cabral Jr.
- et al.
- 1999
- Journal of Applied Physics
PaperEffects of annealing conditions on charge loss mechanisms in MOCVD Ba0·7Sr0·3TiO3 thin film capacitors
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 1999
- Journal of the European Ceramic Society
Paper(Ba,Sr)TiO3 dielectrics for future stacked-capacitor DRAM
- D.E. Kotecki
- J.D. Baniecki
- et al.
- 1999
- IBM J. Res. Dev
PaperStability and oxidation behavior of Ir thin film electrodes on Si and SiO2
- K.L. Saenger
- A. Grill
- et al.
- 1998
- MRS Fall Meeting 1998
Conference paperBuried, self-aligned barrier layer structures for perovskite-based memory devices comprising Pt or Ir bottom electrodes on silicon-contributing substrates
- K.L. Saenger
- A. Grill A
- et al.
- 1998
- Journal of Applied Physics
PaperNoble metal suicide formation in metal/Si structures during oxygen annealing: Implications for perovskite-based memory devices
- K.L. Saenger
- A. Grill
- et al.
- 1998
- Journal of Materials Research
PaperLow temperature formation of C54-TiSi2 using titanium alloys
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1997
- Applied Physics Letters
PaperOxygen-induced inhibition of noble metal silicide formation: implications for electrode/barrier structures used with perovskite materials
- K.L. Saenger
- A. Grill
- et al.
- 1997
- MRS Fall Meeting 1997
Conference paperLowering the formation temperature of the C54-TiSi2 phase using a metallic interfacial layer
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1997
- Journal of Materials Research
Paper