Effect of TiOX nucleation layer on crystallization of Bi4Ti3O12 films
- Deborah A. Neumayer
- Peter R. Duncombe
- et al.
- 1997
- Integrated Ferroelectrics
Paper
Publications
97 results for Katherine Saenger
Diamondlike carbon materials as low-k dielectrics for multilevel interconnects in ULSI
- A. Grill
- V.V. Patel
- et al.
- 1996
- MRS Fall Meeting 1996
Conference paperIn-situ X-ray diffraction analysis of TiSi2 phase formation from a titanium-molybdenum bilayer
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1996
- MRS Fall Meeting 1996
Conference paperInfrared laser interferometric thermometry: Extension to batch processing environments
- K.L. Saenger
- 1995
- Review of Scientific Instruments
PaperInvestigation of titanium silicide formation in Ti+Si reactions using infrared spectroscopy and x-ray diffraction
- K.L. Saenger
- C. Cabral Jr.
- et al.
- 1995
- Journal of Applied Physics
PaperIn situ analysis of the formation of thin TiSi2 (<50 nm) contacts in submicron CMOS structures during rapid thermal annealing
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Conference paperLight scattering measurement of surface topography during formation of titanium silicide
- C. Lavoie
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Conference paperExtremely high electron mobility in Si/SiGe modulation-doped heterostructures
- K. Ismail
- M. Arafa
- et al.
- 1995
- Applied Physics Letters
PaperIn situ x-ray diffraction analysis of the C49-C54 titanium silicide phase transformation in narrow lines
- R.A. Roy
- L. Clevenger
- et al.
- 1995
- Applied Physics Letters
PaperA comparison of C54-TiSi2 formation in blanket and submicron gate structures using in situ x-ray diffraction during rapid thermal annealing
- J. Bucchignano
- G.B. Stephenson
- et al.
- 1995
- Journal of Materials Research
Paper